Verifire™ XL
大口径立式干涉仪
大口径、小占地面积 – Verifire XL 是一款一站式干涉仪工作站,可轻松测试直径达 300 mm 的平面光学元器件。
这款完全集成的系统易于使用,其重型倾斜平台可提供可重复的零件定位,而无需定制夹具。
占地面积小,内置隔振系统,并配有控制器显示器支架,只占用很小的车间地板空间。
-
更多信息
-
宣传册和
规格表 -
应用
指南 -
使用手册
-
技术论文
-
视频
独立的大口径工作站,用于测量直径达 12 英寸(300 mm)的平面光学表面面形,如镜子、窗片、半导体晶片、晶圆卡盘和密封平面。
主要特点
- 12 英寸(300 mm)口径,下视式立式设计,便于零件处理和对准
- 一站式的独立系统,包括干涉仪主机、被动隔振系统、测试件对准台和 1/15 波 PVr 透射平面镜(TF)
- 紧凑的尺寸,最大限度地减少了对宝贵地面空间的占用
- 集成的隔振和 QPSI™ 技术允许在生产环境中进行可靠的测量
标题
文件
下载链接
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0007-tn.png?revision=1542a4dc-6c20-48ad-b055-cb3eaf5c0d35)
Measurement of Aspheric Surfaces
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0008-tn.png?revision=2baf0664-3248-490d-aca3-de59b01d2173)
Determining Asphere Measurability
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0010-tn.png?revision=44bcfb71-244a-422d-b5b7-7b6cc7ab52dc)
Grazing Incidence Testing
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0015-tn.png?revision=98099967-e3b4-4896-aecd-4a4792832921)
Interferogram Scale Factor
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0016-tn.png?revision=ad50046f-941f-4b20-8ebe-9c66d914f1ca)
Silver Overcoat Spray
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0017-tn.png?revision=accc0554-fb6e-477d-8615-b03318e01626)
Testing Cylindrical Surfaces with Computer Generated Holograms
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0018-tn.png?revision=056c98eb-082e-49bb-a883-9f8e96e1c807)
Fringe Analysis versus Phase Measuring Interferometry
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/app-note-thumbnails/interferometers/an-0019-tn.png?revision=9988b739-d6d1-451d-9743-a81b3f007eac)
Finite Conjugate Lens Testing
标题
文件
下载链接
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
Solutions for environmentally robust interferometric optical testing
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
101 Frame Algorithm For Phase Shifting Interferometry
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
A next-generation optical surface form inspection instrument for high-volume production applications
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
A review of selected topics in interferometric optical metrology
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
Absolute distance measurements using FTPSI with a widely tunable IR laser
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
Absolute Interferometric Testing of Spherical Surfaces
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
![img1](/-/media/project/ameteksxa/zygo/ametekzygo/thumbnail-images/tech-paper-thumbnails/tech-paper-generic-tn.png?la=zh-cn&revision=d775c727-1b39-44b2-8a53-3a3d58ff131d)
Adjustable coherence depth in a geometrically-desensitized interferometer
标题
文件
下载链接
A next-generation optical surface form inspection instrument for high-volume production applications
Document技术论文
下载链接 下载