ZYGO 产品的专利信息


光学
轮廓仪

7,068,376
7,106,454
7,139,081
7,177,029
7,239,398
7,271,918
7,298,494
7,321,431
7,324,210
7,428,057
7,446,882
7,456,975
7,466,429
7,468,799
7,522,288
7,564,566
7,586,620
7,616,323
7,619,746
7,889,355
7,933,025
7,948,637
8,045,175
8,107,085
8,126,677
8,698,891
8,780,334
9,025,162
9,541,381
9,599,534
9,658,129
9,719,777
9,798,130
10,451,413
10,591,284


激光
干涉仪

7,612,893
7,710,580
7,796,273
7,948,638
7,948,639
9,103,649
9,234,739
9,435,640
10,267,617
10,890,428
10,962,348
11,841,548

位移位置传感器

6,950,192
7,428,685
7,542,147
7,576,868
7,636,166
7,639,367
7,826,064
8,300,233
8,670,127
8,885,172
8,913,226
8,988,690
9,115,975
9,140,537
9,146,093
10,066,974
10,190,871
10,845,251